Abstract
In this paper the mechanism of channeling of K42 ions in monocrystalline tungsten is investigated. The influence of various parameters—ion energy, crystal direction, surface oxide thickness, misorientation, lattice temperature, and bombardment dose—has been studied. It is found that: (i) the over-all range distribution is rather sensitive to all these parameters; (ii) the maximum range Rmax depends only on the ion energy and crystal direction; (iii) planar channeling exists down to the lowest energy studied (70 keV); (iv) the critical angle for channeling is about 3° at 500 keV and decreases slowly with increasing energy. In all cases, the crystals have been oriented with respect to the ion beam to ±0.1°, by means of wide-angle scattering of protons. An attempt is made to correlate the results for these fairly slow heavy ions with Lindhard's theoretical treatment of the motion of charged particles in a crystal lattice, and with the experimental studies on fast light ions.