Parallel-resonator HF micromechanical bandpass filters
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1161-1164
- https://doi.org/10.1109/sensor.1997.635411
Abstract
SUMMARY High frequency, fourth-order, micromechanical bandpass fil- ters, with tunable frequency and bandwidth, and filter Q's in the thousands, are demonstrated in a polysilicon surface microma- chining technology. These filters utilize a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Design formulas are given for Butter- worth, Chebyshev, and Bessel filters, and each of these filter types are demonstrated with center frequencies close to 14.5 MHz and filter Q's ranging from 830 to 1600.Keywords
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