Negative ion densities in NF3 discharges
- 1 February 1984
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 44 (3), 299-300
- https://doi.org/10.1063/1.94731
Abstract
This letter shows that the negative ion density in the NF3 discharge is one to two orders of magnitude larger than the electron density. A XeCl laser was used to photodetach the ions and the resultant excess electron population was measured using microwave interferometry.Keywords
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