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Columnar grains and twins in high-purity sputter-deposited copper
Home
Publications
Columnar grains and twins in high-purity sputter-deposited copper
Columnar grains and twins in high-purity sputter-deposited copper
SD
S. D. Dahlgren
S. D. Dahlgren
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1 July 1974
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 11
(4)
,
832-836
https://doi.org/10.1116/1.1312763
Abstract
No abstract available
Keywords
TWINS
SUBSTRATE
SPUTTER
GRAINS
Å/SEC
MADE
RECRYSTALLIZATION
PLANES
COPPER
PURITY
Cited by 33 articles