A Small Microwave Plasma Source for Long Column Production without Magnetic Field
- 1 June 1975
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 3 (2), 55-59
- https://doi.org/10.1109/tps.1975.4316875
Abstract
A new HF device is described. It allows the production, without the use of a magnetic field, of long plasma columns from a small HF coupling structure situated at one end of the column. Its operation is based on the propagation of a cold plasma surface wave. This device can work (in argon for example) at pressures from 2 mTorr to 20 Torr with electron densities from 1010 cm-3 to 1013 cm-3, depending on plasma diameter and HF power. Typically, 80W of 500 MHz HF will produce a 25 mn diameter column of 1.8 m length. The plasma is quiescent (low electron density fluctuations), efficient (~ 100% absorbed power), and perfectly reproducible. It can be used as a substitute for a positive column, and some practical applications are foreseen in ion production, laser excitation, gas preionization and spectroscopic sources.Keywords
This publication has 12 references indexed in Scilit:
- A new HF device for the production of long plasma columns at a high electron densityPhysics Letters A, 1974
- Description and properties of an r.f. plasma used for the study of parametric interaction of a strong E-M field with plasmaPlasma Physics, 1974
- Retuning and Hysteresis Effects of a rf Plasma in a Variable Size Microwave CavityJournal of Applied Physics, 1971
- Bounded, Resonantly Sustained High-Frequency Plasmas in a Magnetic Field and Densities High above Critical DensityPhysics of Fluids, 1969
- FREQUENCY-SHIFTING METHOD OF EXCITING A PLASMA IN A RESONANT CAVITYApplied Physics Letters, 1969
- Transition entre deux resonances D'une decharge haute frequence autoresonnantePhysics Letters A, 1968
- Resonances of a Microwave Cavity Partially Filled with a PlasmaJournal of Applied Physics, 1962
- Space Charge Waves in Cylindrical Plasma ColumnsJournal of Applied Physics, 1959
- A re-entrant cavity for measurement of complex permeability in the very-high-frequency regionJournal of Research of the National Bureau of Standards, 1956
- The Admittance of High Frequency Gas DischargesPhysical Review B, 1949