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Re-emission of Sputtered SiO[
2
] During Growth and Its Relation to Film Quality
Home
Publications
Re-emission of Sputtered SiO[
2
] During Growth and Its Relation to Film Quality
Re-emission of Sputtered SiO[
2
] During Growth and Its Relation to Film Quality
LM
L. I. Maissel
L. I. Maissel
RJ
R. E. Jones
R. E. Jones
CS
C. L. Standley
C. L. Standley
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1 March 1970
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 14
(2)
,
176-181
https://doi.org/10.1147/rd.142.0176
Abstract
No abstract available
Cited by 34 articles