Nanolithography Based on Real-Time Electrically Controlled Indentation with an Atomic Force Microscope for Nanocontact Elaboration
- 3 October 2003
- journal article
- research article
- Published by American Chemical Society (ACS) in Nano Letters
- Vol. 3 (11), 1599-1602
- https://doi.org/10.1021/nl034610j
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