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Planar magnetron sputtering
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Publications
Planar magnetron sputtering
Planar magnetron sputtering
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Robert K. Waits
Robert K. Waits
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1 March 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(2)
,
179-187
https://doi.org/10.1116/1.569451
Abstract
No abstract available
Keywords
MAGNETRON SPUTTERING
Cited by 180 articles