Carburization of Tungsten Filaments in a Hot-Wire Chemical Vapor Deposition Process using 1,1,3,3-Tetramethyl-1,3-disilacyclobutane
- 2 September 2009
- journal article
- research article
- Published by American Chemical Society (ACS) in ACS Applied Materials & Interfaces
- Vol. 1 (9), 1919-1926
- https://doi.org/10.1021/am900329q
Abstract
No abstract availableKeywords
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