Magnetic field effects in the plasma-enhanced chemical vapor deposition of boron nitride

Publisher Website

1 November 1985

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 3 (6), 2135-2140
https://doi.org/10.1116/1.573267

Abstract

No abstract available

Keywords

MAGNETIC FIELD

Cited by 17 articles