BiSrCaCuO Thin Film Grown on SrTiO3 Substrate with Off-Oriented (110) Surface
- 1 April 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (4A), L582
- https://doi.org/10.1143/jjap.30.l582
Abstract
A Bi2(Sr, Ca)3Cu2O x thin film with the (117) orientation was formed on a slightly off-oriented (110) SrTiO3 substrate by single-target sputtering. The (110) substrate off-oriented by 5° is considered to have limited film growth in one direction. From RHEED and cross-sectional TEM observations, it was found that the c-axis of the film tilts against the substrate surface by 46-47° and the SrTiO3(110) plane by 41-42°. Also, the surface morphology observed by SEM has been much improved.Keywords
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