Surface-micromachined electrostatic microrelay
- 1 April 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 66 (1-3), 345-354
- https://doi.org/10.1016/s0924-4247(97)01703-2
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Micromechanical Membrane Switches on SiliconIBM Journal of Research and Development, 1979