The sliding friction and wear behavior of single-crystal, polycrystalline and oxidized silicon
- 31 January 1994
- Vol. 171 (1-2), 25-32
- https://doi.org/10.1016/0043-1648(94)90344-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A study of static friction between silicon and silicon compoundsJournal of Micromechanics and Microengineering, 1992
- Surface micromachined mechanisms and micromotorsJournal of Micromechanics and Microengineering, 1991
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- The wear rate of n-type Si(100)Wear, 1985
- Microfracture beneath point indentations in brittle solidsJournal of Materials Science, 1975