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Combined AFM and laser lithography on hydrogen-passivated amorphous silicon
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Publications
Combined AFM and laser lithography on hydrogen-passivated amorphous silicon
Combined AFM and laser lithography on hydrogen-passivated amorphous silicon
KB
Karen Birkelund
Karen Birkelund
MM
Matthias Müllenborn
Matthias Müllenborn
FG
François Grey
François Grey
Flemming Jensen
Flemming Jensen
SM
Steen Madsen
Steen Madsen
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31 December 1996
journal article
Published by
Elsevier
in
Superlattices and Microstructures
Vol. 20
(4)
,
555-560
https://doi.org/10.1006/spmi.1996.0114
Abstract
No abstract available
Keywords
SILICON
COMBINED AFM
HYDROGEN PASSIVATED
LASER LITHOGRAPHY
AMORPHOUS
AFM AND LASER
Cited by 5 articles