Oxidation of Silicon Using Electron Cyclotron Resonance Nitrous Oxide Plasma and Its Application to Polycrystalline Silicon Thin Film Transistors

Abstract

The active cathode material in commercial rechargeable lithium batteries, is shown to be a p‐type semiconductor, associated with the presence of a small concentration of ions. Its conductivity at room temperature can be increased by over two orders of magnitude, to ∼0.5 S cm⁻¹, by partial substitution of by and compensating hole creation. The electrochemical performance of is comparable to that of ; a small reduction in capacity, associated with a reduction in content, occurs but good reversibility is retained and, in contrast to , the Mg‐doped material is single phase throughout the charge/discharge cycle.