Performance characteristics of the extrion 160-10 ion implantation system
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2), 16-26
- https://doi.org/10.1016/0168-583x(85)90604-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Applications of Magnetic Scanning to High Current ImplantationIEEE Transactions on Nuclear Science, 1981