Scanning auger electron microscopy at 30 nm resolution
- 1 September 1976
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine
- Vol. 34 (3), 495-500
- https://doi.org/10.1080/14786437608222040
Abstract
Auger electron images and analysis have been obtained with a spatial resolution of 30 nm, using an ultra-high vacuum field emission scanning electron microscope fitted with a cylindrical mirror analyser. This represents a large improvement over currently available instruments, and has important implications for microstructural studies of surfaces.Keywords
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