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Low Temperature Chemical Vapor Deposition of Boron Doped Silicon Films
Home
Publications
Low Temperature Chemical Vapor Deposition of Boron Doped Silicon Films
Low Temperature Chemical Vapor Deposition of Boron Doped Silicon Films
LH
Lou H. Hall
Lou H. Hall
KK
K. M. Koliwad
K. M. Koliwad
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1 January 1973
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 120
(10)
,
1438
https://doi.org/10.1149/1.2403279
Abstract
No abstract available
Keywords
BORON DOPED
SILICON FILMS
DOPED SILICON
LOW TEMPERATURE
DEPOSITION
TEMPERATURE CHEMICAL VAPOR
Cited by 25 articles