Comparison of Langmuir Probe and Spectrometric Electron Temperature Measurements

Abstract

Langmuir probes, because of their convenience and their ability to give time‐resolved measurements, are often used for temperature measurements in plasmas. Since probe results are subject to suspicion, we compare probe and spectrometric electron temperature measurements in a particular low‐temperature plasma in which this is possible. We find probe temperatures to be significantly higher over an electron temperature range (measured spectrometrically) of at least 410° to 820°K.