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Template-Set Approach to VLSI Pattern Inspection
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Template-Set Approach to VLSI Pattern Inspection
Template-Set Approach to VLSI Pattern Inspection
SC
Soo-Ik Chae
Soo-Ik Chae
JW
James T. Walker
James T. Walker
DD
David H. Dameron
David H. Dameron
CF
Chong-Cheng Fu
Chong-Cheng Fu
JM
James D. Meindl
James D. Meindl
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18 May 1987
proceedings article
Published by
SPIE-Intl Soc Optical Eng
Vol. 730
,
136-144
https://doi.org/10.1117/12.937868
Abstract
A new approach is described for the automatic detection of defects in VLSI circuit patterns such as photomasks and wafers. It is based on morphological feature extraction using templates that represent a set of local pixel configurations within a specified window. These templates are stored in content-addressable memories (CAMs) to facilitate parallel comparisons of window-pattern scanning over a tested image. Maskable CAMs reduce the size of a template set substantially. Two error-detection algorithms are implemented to detect both random defects and dimensional errors.© (1987) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Keywords
CIRCUITS
ALGORITHMS
AUTOMATIC
PHOTOMASKS
FEATURE EXTRACTION
INSPECTION
PATTERNS
VERY LARGE SCALE INTEGRATION
TEMPLATES
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