R.F. magnetron sputtering of ferroelectric PZT films
- 1 November 1983
- journal article
- Published by Taylor & Francis in Ferroelectrics
- Vol. 51 (1), 93-98
- https://doi.org/10.1080/00150198308009058
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Ion-beam deposition of thin films of ferroelectric lead zirconate titanate (PZT)Journal of Applied Physics, 1979
- Some electrical and optical properties of ferroelectric lead-zirconate–lead-titanate thin filmsJournal of Applied Physics, 1977
- Preparation of Pb(Zr,Ti)O3 thin films by an electron beam evaporation techniqueApplied Physics Letters, 1976
- Poling Dependence of the Surface-Wave Frequency-Generation on PZTJapanese Journal of Applied Physics, 1974
- Ceramic ferroelectric field effect studiesIEEE Transactions on Electron Devices, 1969