Q-factor and frequency shift of resonating silicon diaphragms in air
- 1 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 27 (1-3), 691-698
- https://doi.org/10.1016/0924-4247(91)87072-b
Abstract
No abstract availableKeywords
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- Resonant diaphragm pressure measurement system with ZnO on Si excitationSensors and Actuators, 1983
- Vibration of Rectangular Plates by the Ritz MethodJournal of Applied Mechanics, 1950
- On the vibrations of an elastic plate in contact with waterProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1920