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Copper(I) precursors for chemical vapor deposition of copper metal
Home
Publications
Copper(I) precursors for chemical vapor deposition of copper metal
Copper(I) precursors for chemical vapor deposition of copper metal
RK
Ravi Kumar
Ravi Kumar
FF
Frank R. Fronczek
Frank R. Fronczek
Andrew W. Maverick
Andrew W. Maverick
WL
W. Gilbert Lai
W. Gilbert Lai
GG
Gregory L. Griffin
Gregory L. Griffin
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1 May 1992
journal article
Published by
American Chemical Society (ACS)
in
Chemistry of Materials
Vol. 4
(3)
,
577-582
https://doi.org/10.1021/cm00021a016
Abstract
No abstract available
Keywords
COPPER
Cited by 45 articles