Atomic Structure Images Formed by Plasma-Loss Electrons

Abstract

Two kinds of energy filtered atomic structure images of Si crystal in (011) orientation formed by no-loss and plasma-loss electrons were photographed using the energy analyzer of a sector type magnet which was attached to the bottom of a high resolution electron microscope. The behavior of plasma-loss electrons in the crystal was discussed on the basis of the dynamical theory of electron diffraction. The contrast of the crystal lattice image formed by the plasma-loss electrons was calculated and compared with the observed image.