High Resolution Tungsten Patterning Using Buffered, Mildly Basic Etching Solutions

Publisher Website

1 February 1975

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 122 (2), 294-298
https://doi.org/10.1149/1.2134198

Abstract

No abstract available

Keywords

HIGH RESOLUTION

Cited by 16 articles