Temperature dependence and non-uniformity of electrical properties of SOI films obtained by oxygen implantation
- 31 March 1985
- journal article
- Published by Elsevier in Physica B+C
- Vol. 129 (1-3), 249-254
- https://doi.org/10.1016/0378-4363(85)90579-0
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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