Models for Marangoni drying
- 1 July 2001
- journal article
- Published by AIP Publishing in Physics of Fluids
- Vol. 13 (7), 1869-1883
- https://doi.org/10.1063/1.1378034
Abstract
Marangoni drying is a new ultra-clean drying process, which relies on surface-tension gradient forces, so-called Marangoni stresses. This method is of particular use in the semiconductor industry wherein obtaining ultra-clean surfaces is of paramount importance. The present work provides a mathematical description of this novel process involving four coupled partial differential equations, derived in the thin-layer approximation, for the film thickness, the concentration of chemicals in the air, at the air–liquid interface and in the bulk of the liquid film. Numerical solution of these equations yields prediction of typical profiles that accompany the spreading and drying processes. Particular attention is aimed at the prediction of the minimum film thickness as a function of system parameters with a view to optimizing the drying process.Keywords
This publication has 25 references indexed in Scilit:
- Surfactant transport on mucus filmsJournal of Fluid Mechanics, 2000
- A model for Marangoni dryingPhysics of Fluids, 1999
- On Marangoni drying: nonlinear kinematic waves in a thin filmJournal of Fluid Mechanics, 1993
- The spreading of heat or soluble surfactant along a thin liquid filmPhysics of Fluids A: Fluid Dynamics, 1993
- Insoluble surfactant spreading on a thin viscous film: shock evolution and film ruptureJournal of Fluid Mechanics, 1992
- Motion of Marangoni-contracted water drops across inclined hydrophilic surfacesLangmuir, 1991
- Physical principles of Marangoni dryingLangmuir, 1991
- Marangoni drying: A new extremely clean drying processLangmuir, 1990
- A simple derivation of the time-dependent convective-diffusion equation for surfactant transport along a deforming interfacePhysics of Fluids A: Fluid Dynamics, 1990
- Flow of a falling film into a poolAIChE Journal, 1978