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Resistivity of Doped Polycrystalline Silicon Films
Home
Publications
Resistivity of Doped Polycrystalline Silicon Films
Resistivity of Doped Polycrystalline Silicon Films
AF
A. L. Fripp
A. L. Fripp
LS
L. H. Slack
L. H. Slack
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1 January 1973
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 120
(1)
,
145-146
https://doi.org/10.1149/1.2403390
Abstract
No abstract available
Keywords
RESISTIVITY
POLYCRYSTALLINE SILICON FILMS
DOPED POLYCRYSTALLINE SILICON
Cited by 48 articles