Role of Condensation Phenomena in the Measurement of Film Thickness by the Oscillating Quartz Crystal Method
- 1 November 1966
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 37 (12), 4433-4436
- https://doi.org/10.1063/1.1708055
Abstract
The deposition of thin layers of ZnS and MgF2 on each other and on a glass surface was studied. The rate of evaporation, the film thickness, and the reflection of the layers were measured simultaneously. Condensation effects were found to influence the formation of layers on different substrates, a fact which has to be taken into account in measurements using the oscillating quartz crystal technique.Keywords
This publication has 2 references indexed in Scilit:
- Vacuum evaporation rate control by use of constant source currentJournal of Scientific Instruments, 1965
- Die optischen Eigenschaften dielektrischer Schichten mit kleinen HomogenitätsstörungenThe European Physical Journal A, 1961