Properties of positive resists. II. Dissolution characteristics of irradiated poly(methyl methacrylate) and poly(methyl methacrylate–co-maleic anhydride)
- 1 March 1987
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 5 (2), 538-545
- https://doi.org/10.1116/1.583945