Multilayer optical interference coatings via glow discharge polymerization techniques
- 15 August 1978
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 17 (16), 2645-2647
- https://doi.org/10.1364/ao.17.002645
Abstract
The incorporation of an optical-thickness monitor in the plasma reactor allows the fabrication of well tuned multilayer optical interference coatings, the variety and application range of which is constrained only by the limited number of presently known well characterized plasma polymers. The properties and deposition idiosyncracies of several plasma polymers found useful for optical thin films are discussed, and optical performance data for specific beam splitter and antireflection coating designs fabricated from available materials are presented.Keywords
This publication has 9 references indexed in Scilit:
- The angluar reflectance of single-layer gradient refractive-index filmsJournal of the Optical Society of America, 1977
- Plasma polymerized coating for polycarbonate: single layer, abrasion resistant, and antireflectionApplied Optics, 1977
- Survey of low temperature rf plasma polymerization and processingJournal of Vacuum Science and Technology, 1976
- Antireflection coating prepared by plasma polymerization of perfluorobutene-2Applied Optics, 1976
- Combination Moisture Resistant and Antireflection Plasma Polymerized Thin Films for Optical CoatingsApplied Optics, 1974
- Effects of Reaction Conditions on the Plasma Polymerization of EthyleneJournal of Macromolecular Science: Part A - Chemistry, 1974
- Formation of Light-Guiding Interconnections in an Integrated Optical Circuit by Composite Tapered-Film CouplingApplied Optics, 1973
- Plasma synthesis of fluorocarbon filmsJournal of Applied Polymer Science, 1973
- Thin Organosilicon Films for Integrated OpticsApplied Optics, 1972