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Molding of LIGA microstructures from fluorinated polymers
Home
Publications
Molding of LIGA microstructures from fluorinated polymers
Molding of LIGA microstructures from fluorinated polymers
RR
R. Ruprecht
R. Ruprecht
HK
H. Kalb
H. Kalb
BK
B. Kowanz
B. Kowanz
WB
W. Bacher
W. Bacher
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17 October 1996
journal article
Published by
Springer Nature
in
Microsystem Technologies
Vol. 2
(4)
,
182-185
https://doi.org/10.1007/s005420050041
Abstract
No abstract available
Keywords
FABRICATION
PVDF
MICROSTRUCTURES
MOLDING
FLUORINATED
PLATES
MICRO VALVE
LIGA
STEPPED
Cited by 8 articles