Principles and applications of elastic scattering with high-energy protons and heavy ions for quantitative microanalysis of metal surfaces, thin layers, and sandwich structures

Abstract

The elastic non-Coulomb and Coulomb scattering of high-energy ions is proposed in useful combination of protons with 4–6 MeV and heavy ions (16O, 12,13C) with 15–35 MeV as effective quantitative and nondestructive spectroscopy of metal surfaces. This method provides analyzing depths of 1–50 μ, high mass or depth resolutions of 100–1000 Å, and selective high sensitivity for hydrogen and light elements up to Si. Successful application is demonstrated by examples measuring superconductors and metals of group V and binary A-15 compounds. The materials of interest for superconducting cavities, tunneling elements, and high field superconductivity like Nb3Sn have been investigated concerning the problems of oxide layers, composition and contamination, thermal treatment, and interfaces.