Medium energy ion scattering analysis of low energy chlorine ion bombarded gallium-arsenide
- 1 April 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 36 (4), 446-454
- https://doi.org/10.1016/0168-583x(89)90348-0
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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