Formation and quenching kinetics of ArF
- 15 July 1977
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 31 (2), 79-82
- https://doi.org/10.1063/1.89597
Abstract
In this paper we report on the formation and quenching kinetics of ArF* (2Σ1/2). The ArF* is produced by irradiating mixtures of Ar and F2. The primary formation channel is via the recombination of Ar+ and Ar+2 with F−. Quenching of ArF* by F2 and Ar have been measured by analyzing the ArF* 2Σ1/2→2Σ1/2 fluorescence as a function of the F2 and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr and Xe to form KrF* and XeF*, respectively.Keywords
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