Optically controlled silicon microactuators
- 1 July 1990
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 1 (1), 81-92
- https://doi.org/10.1088/0957-4484/1/1/013
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Invited Paper Silicon In OpticsPublished by SPIE-Intl Soc Optical Eng ,1987
- Photoacoustic Oscillator SensorsPublished by SPIE-Intl Soc Optical Eng ,1987
- Fiber-Optic Sensors Based On Resonating Mechanical StructuresPublished by SPIE-Intl Soc Optical Eng ,1987
- Optically Excited And Interrogated Micromechanical Silicon Cantilever StructurePublished by SPIE-Intl Soc Optical Eng ,1987
- Micromechanical resonators in fiber-optic systemsOptics Letters, 1987
- Optically excited resonant diaphragm pressure sensorElectronics Letters, 1987
- Resonant-microbridge vapor sensorIEEE Transactions on Electron Devices, 1986
- Optical activation of a silicon vibrating sensorElectronics Letters, 1986
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984
- The resonant gate transistorIEEE Transactions on Electron Devices, 1967