Diffuse scattering of hard x rays from rough surfaces

Abstract
The diffuse scattering of hard x rays from rough solid surfaces has been measured and described quantitatively in terms of an improved distorted-wave Born approximation. The rough surface is characterized by the rms roughness σ, the height-height correlation length ξ, and the roughness exponent h. The value for σ is in excellent agreement with that deduced from reflectivity. The significance of the parameters σ, ξ, and h is tested by comparison with the results obtained from scanning force mircoscopy.

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