Recent progress on LWIR and VLWIR HgCdTe focal plane arrays

Abstract
High performance LWIR and VLWIR focal plane arrays have been produced on advanced HgCdTe/ZnCdTe materials. The ZnCdTe substrates typically are n-type with an infrared transmission over 65%. Mesa and planar ion-implantation-isolated heterojunction processes have been used to produce the arrays. The operability of 128x128, 10.6mm arrays reached 99.27% based on the criteria that the signal output is within +/-30% of the mean. Several 320x256 arrays with wavelength from 12mm to 13.75mm at 77-85K have also been produced. Excellent imaging pictures have been obtained at these temperatures.