Ionic and neutral products of an RF discharge in methane
- 31 January 1975
- journal article
- Published by Elsevier in International Journal of Mass Spectrometry and Ion Physics
- Vol. 16 (1-2), 137-149
- https://doi.org/10.1016/0020-7381(75)85020-0
Abstract
No abstract availableKeywords
This publication has 26 references indexed in Scilit:
- Mass-spectrometric ion sampling from reactive plasmas: III. Mixtures of vinyltrimethysilane and argon or heliumInternational Journal of Mass Spectrometry and Ion Physics, 1974
- Mass-spectrometric ion sampling from reactive plasmas II. Mixtures of vinyltrimethylsilane and argonInternational Journal of Mass Spectrometry and Ion Physics, 1973
- Mass-spectrometric ion sampling from reactive plasmas I. Apparatus for argon and reactive dischargesInternational Journal of Mass Spectrometry and Ion Physics, 1973
- Formation of Light-Guiding Interconnections in an Integrated Optical Circuit by Composite Tapered-Film CouplingApplied Optics, 1973
- Chemical Reactions of Methane in a Triboelectric DischargeCanadian Journal of Chemistry, 1972
- Thin Organosilicon Films for Integrated OpticsApplied Optics, 1972
- THE DECOMPOSITION OF METHANE IN THE NEGATIVE GLOWCanadian Journal of Chemistry, 1961
- THE DECOMPOSITION OF METHANE BY LOW-ENERGY ELECTRONSCanadian Journal of Chemistry, 1960
- Decomposition of Methane in an Electrical Discharge1Journal of the American Chemical Society, 1953
- The Decomposition of Methane in Glow Discharge at Liquid-Air TemperatureThe Journal of Chemical Physics, 1942