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Low-Temperature Deposition of Silicon Oxide Films
Home
Publications
Low-Temperature Deposition of Silicon Oxide Films
Low-Temperature Deposition of Silicon Oxide Films
LA
Leslie L. Alt
Leslie L. Alt
SI
Samuel W. Ing
Samuel W. Ing
KL
Karl W. Laendle
Karl W. Laendle
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1 January 1963
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 110
(5)
,
465
https://doi.org/10.1149/1.2425789
Abstract
No abstract available
Keywords
SILICON OXIDE
OXIDE FILMS
LOW TEMPERATURE DEPOSITION
Cited by 29 articles