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Fabrication of SiO
2
Blazed Holographic Gratings by Reactive Ion-Etching
Home
Publications
Fabrication of SiO
2
Blazed Holographic Gratings by Reactive Ion-Etching
Fabrication of SiO
2
Blazed Holographic Gratings by Reactive Ion-Etching
SM
Shinji Matsui
Shinji Matsui
TY
Toshiya Yamato
Toshiya Yamato
HA
Hiroaki Aritome
Hiroaki Aritome
SN
Susumu Namba
Susumu Namba
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1 March 1980
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 19
(3)
,
L126-L128
https://doi.org/10.1143/jjap.19.l126
Abstract
No abstract available
Cited by 27 articles