Composition control and hydrogen permeation characteristics of sputter deposited palladium–silver membranes
- 8 July 1999
- journal article
- Published by Elsevier in Journal of Membrane Science
- Vol. 161 (1-2), 67-76
- https://doi.org/10.1016/s0376-7388(99)00087-3
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Fabrication of thin metallic membranes by MOCVD and sputteringJournal of Membrane Science, 1997
- Composite
Pd Ta Journal of Membrane Science, 1996 - Synthesis and hydrogen permeation properties of ultrathin palladium-silver alloy membranesJournal of Membrane Science, 1995
- Simulations of trench-filling profiles under ionized magnetron sputter metal depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Fabrication of ultrathin metallic membranes on ceramic supports by sputter depositionJournal of Membrane Science, 1995
- Sputtering of NiTi alloys: a comparison of experiment and simulationVacuum, 1993
- Simulation of ion beam assisted deposition—a comparison with experimental resultsVacuum, 1993
- Scaling properties of the shadowing model for sputter depositionPhysical Review E, 1993
- Macroscopic model for columnar growth of amorphous films by sputter depositionJournal of Vacuum Science & Technology A, 1991
- Sputtering of multicomponent materials: Elements of a theoryNuclear Instruments and Methods in Physics Research, 1982