Preparation of Perpendicular Magnetic Co-Ru Films by an RF Sputtering Method

Abstract
The crystallographic orientation and magnetic properties of sputtered hcp Co-Ru films have been studied. The [101̄0] orientation was dominant for the initial stages of film formation, but increasing film thickness gave rise to the high [0001] orientation normal to the film surface. The Co-Ru films with the high [0001] orientation had a columnar structure. Co-Ru films with a thickness of over 2 µm showed the perpendicular magnetic state.

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