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Control of Thin Film Processing Behavior Through Precursor Structural Modifications
Home
Publications
Control of Thin Film Processing Behavior Through Precursor Structural Modifications
Control of Thin Film Processing Behavior Through Precursor Structural Modifications
RS
R. W. Schwartz
R. W. Schwartz
JV
J. A. Voigt
J. A. Voigt
TB
T. J. Boyle
T. J. Boyle
TC
T. A. Christenson
T. A. Christenson
CB
C. D. Buchheit
C. D. Buchheit
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1 January 1995
book chapter
Published by
Wiley
p.
1045-1056
https://doi.org/10.1002/9780470314784.ch48
Abstract
No abstract available
Keywords
SEGREGATION
INGREDIENTS
MODERNIZATION
DIAMETER
FLUCTUATING
Cited by 13 articles