An automatic test set for measuring dopant concentration profiles in epitaxial films
- 31 January 1969
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 12 (1), 31-N2
- https://doi.org/10.1016/0038-1101(69)90133-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Impurity Distribution in Epitaxial Silicon FilmsJournal of the Electrochemical Society, 1962