Decomposition of hexafluoroacetylacetonate Cu(I) vinyltrimethylsilane on, and diffusion of Cu into single crystal and polycrystalline titanium nitride
- 20 September 1993
- journal article
- Published by Elsevier in Surface Science
- Vol. 295 (1-2), 219-229
- https://doi.org/10.1016/0039-6028(93)90198-s
Abstract
No abstract availableKeywords
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