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Pumping of hydrogen during plasma–graphite interaction
Home
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Pumping of hydrogen during plasma–graphite interaction
Pumping of hydrogen during plasma–graphite interaction
WH
W. L. Hsu
W. L. Hsu
RC
R. A. Causey
R. A. Causey
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1 July 1987
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 5
(4)
,
2768-2772
https://doi.org/10.1116/1.574738
Abstract
No abstract available
Keywords
GRAPHITE INTERACTION
PUMPING OF HYDROGEN DURING PLASMA
Cited by 27 articles