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Selective Silicon Epitaxy and Orientation Dependence of Growth
Home
Publications
Selective Silicon Epitaxy and Orientation Dependence of Growth
Selective Silicon Epitaxy and Orientation Dependence of Growth
PR
P. Rai-Choudhury
P. Rai-Choudhury
DS
D. K. Schroder
D. K. Schroder
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1 January 1973
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 120
(5)
,
664
https://doi.org/10.1149/1.2403529
Abstract
No abstract available
Keywords
ORIENTATION DEPENDENCE
SILICON EPITAXY
SELECTIVE SILICON
DEPENDENCE OF GROWTH
EPITAXY AND ORIENTATION
Cited by 43 articles