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Phosphorus Diffusion in Silicon Free from the Surface Effect under Extrinie Conditions
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Phosphorus Diffusion in Silicon Free from the Surface Effect under Extrinie Conditions
Phosphorus Diffusion in Silicon Free from the Surface Effect under Extrinie Conditions
SM
Satoru Matsumoto
Satoru Matsumoto
EA
Eisuke Arai
Eisuke Arai
HN
Hiroaki Nakamura
Hiroaki Nakamura
TN
Tatsuya Niimi
Tatsuya Niimi
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1 November 1975
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 14
(11)
,
1665-1672
https://doi.org/10.1143/jjap.14.1665
Abstract
No abstract available
Keywords
PHOSPHORUS DIFFUSION
SILICON FREE
EXTRINIE CONDITIONS
DIFFUSION IN SILICON
EFFECT UNDER EXTRINIE
Cited by 5 articles