An Optical Thickness Monitor for Thin Film Vacuum Deposition Control
- 1 May 1972
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 43 (5), 740-743
- https://doi.org/10.1063/1.1685745
Abstract
An optical thickness monitoring device is described which utilizes simple mechanical construction and integrated circuit electronics to achieve a system which is easy to align, accurate, and highly reliable.Keywords
This publication has 1 reference indexed in Scilit:
- Method for Determining the Optical Constants of Semitransparent FilmsApplied Optics, 1971